Onyx Hybrid Metrology - System Automatic Health Monitoring

Keep the tool calibrated and stable so that all measurement recipes will yield consistent results over a long period of time.

May 10th 2017

Regular preventive maintenance keeps the system calibrated, auto health
monitoring is designed for daily quality assurance.

-Typically set for an automatic self-test every 48 hours
-Monitoring runs when the system is idle and doesn't affect run time
-Tests a variety of functional parameters and make calibration adjustments
-Home screen indicates the process status of each test and alerts
-Complete auto-calibration requires less than 10 minutes

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