Introduction: In-Line Single wafer pass capability of detecting and analyzing process issues provides a cost effective method implementing a hybrid metrology sensor capability.
Detection and analysis with a small beam spot are done in concert, on one system is XwinSys competitive advantage. XwinSys offers a cost-effective solution, while maximizing data generation and minimizing wafer handling risks.
Problem statement: Find a method of rapidly detecting and analyzing thin film issues on small area features, preferably in a single wafer pass. Typically, this task would involve in-line and off-line analysis tools and a large amount of time to perform which would interrupt the process flow, making it not feasible in a production environment.
Offered Solution: The XwinSys ONYX system uses a highly sensitive color 2D camera to qualitatively find evidence of a film issue on a feature, detecting an anomaly which can then be reviewed with an XRF rapidly to quantify the issue.